Title:
【発明の名称】半導体装置の製造方法
Document Type and Number:
Japanese Patent JP2744022
Kind Code:
B2
Inventors:
Yuko Niki
Masaharu Watanabe
Soichi Nadahara
Masaharu Watanabe
Soichi Nadahara
Application Number:
JP20608588A
Publication Date:
April 28, 1998
Filing Date:
August 19, 1988
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L21/322; H01L21/316; (IPC1-7): H01L21/322; H01L21/316
Domestic Patent References:
| JP6151930A | ||||
| JP6042840A | ||||
| JP5618430A | ||||
| JP59188925A | ||||
| JP6084813A |
Attorney, Agent or Firm:
Takehiko Suzue (2 outside)