【発明の名称】スパッタ用ターゲットの接合方法

Title:

【発明の名称】スパッタ用ターゲットの接合方法

Document Type and Number:

Japanese Patent JP2745145

Kind Code:

B2

Inventors:

Takayuki Todo
Minoru Kojima
Koichi Tanaka

Application Number:

JP7137789A

Publication Date:

April 28, 1998

Filing Date:

March 23, 1989

Export Citation:

Assignee:

High purity chemical research institute

International Classes:

C23C14/34; H01L21/203; H01L21/285; (IPC1-7): C23C14/34; H01L21/203; H01L21/285

Domestic Patent References:

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