Title:
【発明の名称】ウエーハのハンドリング装置
Document Type and Number:
Japanese Patent JP2747518
Kind Code:
B2
Inventors:
KUROKI KAZUNORI
Application Number:
JP31133888A
Publication Date:
May 06, 1998
Filing Date:
December 09, 1988
Export Citation:
Assignee:
SUMITOMO SHICHITSUKUSU KK
International Classes:
B25J15/06; B65G47/91; B65G49/07; B66C1/00; B66C1/02; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B25J15/06; B66C1/02
Domestic Patent References:
| JP58141536A | ||||
| JP6281725A |
Attorney, Agent or Firm:
Mori Masazumi