Title:
【発明の名称】発光素子の製造装置
Document Type and Number:
Japanese Patent JP2757271
Kind Code:
B2
Inventors:
NISHII YOSHUKI
SEKO KOJI
YAMANAKA AKIO
KAMIMURA SASHIRO
HARA ZENICHIRO
FUTAISHI SHUNICHI
SHIBAYAMA KOZABURO
SEKO KOJI
YAMANAKA AKIO
KAMIMURA SASHIRO
HARA ZENICHIRO
FUTAISHI SHUNICHI
SHIBAYAMA KOZABURO
Application Number:
JP13223291A
Publication Date:
May 25, 1998
Filing Date:
May 09, 1991
Export Citation:
Assignee:
ISE DENSHI KOGYO KK
MITSUBISHI DENKI KK
MITSUBISHI DENKI KK
International Classes:
H01J9/26; H01J9/42; (IPC1-7): H01J9/26
Domestic Patent References:
| JP2192652A | ||||
| JP62193655U |
Attorney, Agent or Firm:
Masaki Yamakawa