Title:
【発明の名称】搬送装置
Document Type and Number:
Japanese Patent JP2761438
Kind Code:
B2
Abstract:
A concentric-shaft rotational drive system for an articulated arm transfer device adaptable for imparting movement to an assembly inside a vacuum chamber wherein rotary movement is imparted to rotors inside the vacuum chamber by means of magnetic fields produced by stators outside the vacuum chamber
Inventors:
HOFUMAISUTAA KURISUTOFUAA
Application Number:
JP52340994A
Publication Date:
June 04, 1998
Filing Date:
April 13, 1994
Export Citation:
Assignee:
BURUTSUKUSU OOTOMEESHON INC
International Classes:
B25J9/06; B25J9/10; B25J9/12; B25J18/02; B25J21/00; H01L21/677; H01L21/687; H02K5/128; H02K16/00; H02K29/00; (IPC1-7): B25J9/06; B25J18/02
Domestic Patent References:
| JPH04271287A | 1992-09-28 | |||
| JPS60146689A | 1985-08-02 | |||
| JP1120336B | ||||
| JP4089683B | ||||
| JPS6315750A | 1988-01-22 |
Attorney, Agent or Firm:
Motohiko Fujimura (1 outside)