Title:
【発明の名称】半導体ウェハカセットの基準位置決定方法
Document Type and Number:
Japanese Patent JP2781846
Kind Code:
B2
Inventors:
Nakatani Ikusho
Tatsufumi Kusuda
Tatsufumi Kusuda
Application Number:
JP30731193A
Publication Date:
July 30, 1998
Filing Date:
November 11, 1993
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G01R31/26; B65G1/00; B65G49/07; H01L21/68; (IPC1-7): B65G1/00; B65G49/07; H01L21/68
Domestic Patent References:
| JP4192346A | ||||
| JP59175740A |
Attorney, Agent or Firm:
Takashi Shimode (1 outside)