Title:
【発明の名称】結晶基板の内部歪み測定方法
Document Type and Number:
Japanese Patent JP2785848
Kind Code:
B2
Inventors:
KUSAKABE KENJI
YAMAUCHI KEIJI
YAMAUCHI KEIJI
Application Number:
JP18102789A
Publication Date:
August 13, 1998
Filing Date:
July 12, 1989
Export Citation:
Assignee:
MITSUBISHI DENKI KK
International Classes:
G01N23/20; (IPC1-7): G01N23/20
Domestic Patent References:
| JP5824842A |
Attorney, Agent or Firm:
Takada Mamoru