Title:
【発明の名称】イオン源
Document Type and Number:
Japanese Patent JP2791911
Kind Code:
B2
Inventors:
KOSHIISHI AKIRA
MATSUDO MASAHIKO
MATSUDO MASAHIKO
Application Number:
JP5887090A
Publication Date:
August 27, 1998
Filing Date:
March 09, 1990
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
H01J27/20; H01J37/08; H01J37/317; H01L21/265; (IPC1-7): H01J27/20; H01J37/08
Domestic Patent References:
| JP62278736A | ||||
| JP61290629A | ||||
| JP6454653A | ||||
| JP1103248U | ||||
| JP54103285U |
Attorney, Agent or Firm:
Saichi Suyama (1 person outside)