Title:
【発明の名称】ボンディングツール
Document Type and Number:
Japanese Patent JP2793282
Kind Code:
B2
Inventors:
OOSHIGE KOJI
Application Number:
JP21925489A
Publication Date:
September 03, 1998
Filing Date:
August 26, 1989
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
H01L21/603; H01L21/60; (IPC1-7): H01L21/603
Domestic Patent References:
| JPS6373532A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)