Title:
【発明の名称】液塗布方法および塗布装置
Document Type and Number:
Japanese Patent JP2798503
Kind Code:
B2
Abstract:
There are provided an apparatus for and a method of forming a coating film of photosensitive resin on a large-sized glass substrate for LCD color filters such that the coating film is not affected by unevenness of a main surface of the substrate. A substrate (S) is sucked and held by a movable holder (8) with its coated main surface directed downward. Provided below the substrate (S) is an application head (H) having a straight slit (13), through which a coating liquid is discharged upward. When the substrate (S) is relatively moved obliquely upward with a particular clearance (I2) between it and the coating head (H), a coating liquid bead (B) is formed between the slit (13) and the substrate (S) and is moved obliquely downward along the substrate (S) to form a coating film (Rd). A meniscus (L2) of the coating liquid bead (B) facing a higher side of the substrate (S) has a greater height (h2) than that of a meniscus (L1) facing a lower side of the substrate such that the height of the meniscus facing the higher side of the substrate (S) is substantially greater than the thickness of a liquid coating film.
Inventors:
Takayasu Komatsu
Shunji Miyakawa
Issei Watanabe
Shunji Miyakawa
Issei Watanabe
Application Number:
JP52410994A
Publication Date:
September 17, 1998
Filing Date:
May 27, 1994
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
B05C3/18; B05C5/02; B05C9/02; B05D1/26; G03F7/16; (IPC1-7): B05C3/18; B05C5/02; B05D1/26
Attorney, Agent or Firm:
Kazuo Sato (3 others)