Title:
【発明の名称】ボンディング装置およびこれを用いたボンディング方法
Document Type and Number:
Japanese Patent JP2806816
Kind Code:
B2
Inventors:
Yoshinori Hirasawa
Application Number:
JP31687394A
Publication Date:
September 30, 1998
Filing Date:
December 20, 1994
Export Citation:
Assignee:
NEC
International Classes:
H01L21/60; H01L21/607; (IPC1-7): H01L21/60; H01L21/607
Domestic Patent References:
| JP346343A | ||||
| JP590354A |
Attorney, Agent or Firm:
Naoki Kyomoto