Title:
【発明の名称】結晶製造に用いる酸素供給物
Document Type and Number:
Japanese Patent JP2807688
Kind Code:
B2
Inventors:
KATO KOJI
MIKI SHINICHIRO
MIKI SHINICHIRO
Application Number:
JP4508890A
Publication Date:
October 08, 1998
Filing Date:
February 26, 1990
Export Citation:
Assignee:
SUMITOMO SHICHITSUKUSU KK
International Classes:
C30B13/10; C30B29/06; H01L21/208; (IPC1-7): C30B13/10; C30B29/06; H01L21/208
Domestic Patent References:
| JP58208193A | ||||
| JP1212292A | ||||
| JP3177388A |
Attorney, Agent or Firm:
Mori Masazumi