Title:
【発明の名称】基板の移し換え装置
Document Type and Number:
Japanese Patent JP2808826
Kind Code:
B2
Abstract:
A substrate transfer apparatus includes two transfer arms pivotably arranged on a support table on opposite sides from each other with respect to a center of the support table. Each of the transfer arms includes: a first set of parallel links, a second set of parallel links, and a substrate holding member. The first set of the links is pivotably connected to the second set of the links at one ends thereof. The other ends of the first set of the links are pivotably connected to the support table. The substrate holding member is provided on the other end of the second set of the links. The each of the substrate holding members moves outward from the support table by stretching of the transfer arms and returns to the support table by bending of the transfer arms, and the transfer arms are bent in an opposite direction to each other with respect to the support table.
Inventors:
ISHIDA TOSHIMICHI
SUZUKI MASAKI
SUZUKI MASAKI
Application Number:
JP13590890A
Publication Date:
October 08, 1998
Filing Date:
May 25, 1990
Export Citation:
Assignee:
MATSUSHITA DENKI SANGYO KK
International Classes:
B25J9/00; B25J9/10; H01L21/677; (IPC1-7): H01L21/68
Domestic Patent References:
| JP62222906A | ||||
| JP63288677A | ||||
| JP3212950A |
Attorney, Agent or Firm:
Tomoyuki Takimoto (1 person outside)