Title:
【発明の名称】光ディスク用スタンパー検査装置
Document Type and Number:
Japanese Patent JP2810121
Kind Code:
B2
Inventors:
Makoto Fujimoto
Application Number:
JP16291889A
Publication Date:
October 15, 1998
Filing Date:
June 26, 1989
Export Citation:
Assignee:
Mitsui Chemicals, Inc.
International Classes:
G01B11/30; G01B11/02; G01B11/22; G01N21/88; G01N21/95; G11B7/26; (IPC1-7): G01B11/02; G01B11/22; G01N21/88
Domestic Patent References:
| JP60166808A | ||||
| JP5973710A | ||||
| JP6426102A |
Attorney, Agent or Firm:
Munenori Sato (1 person outside)