Title:
【発明の名称】ウェーハ搬送装置
Document Type and Number:
Japanese Patent JP2817945
Kind Code:
B2
Inventors:
Koji Osawa
Application Number:
JP11249089A
Publication Date:
October 30, 1998
Filing Date:
May 01, 1989
Export Citation:
Assignee:
NIDEK CORPORATION
International Classes:
B65G47/91; B65G49/07; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B65G49/07
Domestic Patent References:
| JP1282834A | ||||
| JP6263230U | ||||
| JP63178331U |