【発明の名称】画像読取装置の製造方法

Japanese Patent JP2823853

B2

PURPOSE:To obtain a low-cost image reader, a read rate of which is increased sufficiently and which is mounted easily, by forming a pair of a sensor section and a signal transfer section onto a base body having an insulating surface and shaping the signal transfer section, including a single crystal semiconductor layer formed onto a nucleation surface, which is shaped onto the insulating base body, consists of a material of a different kind and has sufficiently fine size. CONSTITUTION:A pair of a sensor section 50 and a signal transfer section 32 is formed onto a base body 1, at least a surface section of which has insulating properties, and the signal transfer section 32 is shaped, including a single crystal semiconductor layer 8 formed onto a nucleation surface, which is shaped onto the insulating base body 1, is composed of a material of a different kind and has enough fine size. An insulating layer 5 having small nucleation density is formed onto a substrate 4, N<+> regions 22, 24, 26 are shaped to the single crystal semiconductor layer 8 such as P-type one 8 grown onto the insulating layer 5 through a selective nucleation method, and a thermal oxide film 28 and a gate electrode 30 are formed, thus shaping the signal transfer section 32 such as a MOS type switch element 32. A photoconductive layer 34 made up of amorphous silicon is formed onto the thermal oxide film 28, and an N<+> layer 36 is shaped onto the layer 34. Electrodes 42, 44, 46, 48 are formed, thus constituting the photoconductivity type sensor section 50 and a capacitor 52 for charge storage.

Itabashi Satoshi

JP16257987A

November 11, 1998

June 30, 1987

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Canon Inc

H01L27/14; H01L27/146; H04N1/028; H04N5/335; H04N5/355; H04N5/361; H04N5/365; H04N5/369; H04N5/374; (IPC1-7): H01L27/146; H04N1/028

JP6292365A
JP5676546A

Yamashita

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