Title:
【発明の名称】乾燥圧縮型の多段式の真空ポンプの運転法および該運転法を実施するための真空ポンプ
Document Type and Number:
Japanese Patent JP2825673
Kind Code:
B2
Abstract:
The invention relates to a method for the operation of a multi-stage, dry compression vacuum pump (1) with an inlet (7) and an outlet (9), in which the aspirated gases contain gaseous components which endanger the operation of the vacuum pump; in order to render the gas components harmless it is proposed that the gases aspirated from the vacuum chamber (8) and flowing through the vacuum pump be carried through a reaction chamber (14) in which the components endangering the vacuum pump are chemically or physically treated at a pressure between the aspiration pressure and the outlet pressure of the vacuum pump.
Inventors:
PAURU BATSUHAMAN
ROTAARU BURENNAA
HARUTOMUUTO KURIEEN
MONIKA KUUN
ROTAARU BURENNAA
HARUTOMUUTO KURIEEN
MONIKA KUUN
Application Number:
JP6168791A
Publication Date:
November 18, 1998
Filing Date:
March 26, 1991
Export Citation:
Assignee:
BARUTSUAASU UNTO RAIBORUTO DOICHURANTO HOORUDEINGU AG
International Classes:
F04C28/00; B01D53/04; B01D53/32; B01D53/68; F04C23/00; F04C25/02; F04C28/02; F04C28/28; F04C29/00; F04C29/12; (IPC1-7): F04C25/02; F04C23/00; F04C29/10
Attorney, Agent or Firm:
Toshio Yano (2 outside)