Title:
【発明の名称】アライメント装置
Document Type and Number:
Japanese Patent JP2829649
Kind Code:
B2
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Inventors:
MORI MAKIKO
OZAWA KUNITAKA
OOTA HIROHISA
UZAWA SHUNICHI
NOSE TETSUSHI
OZAWA KUNITAKA
OOTA HIROHISA
UZAWA SHUNICHI
NOSE TETSUSHI
Application Number:
JP29002189A
Publication Date:
November 25, 1998
Filing Date:
November 09, 1989
Export Citation:
Assignee:
KYANON KK
International Classes:
H01L21/30; G03F9/00; H01L21/027; (IPC1-7): H01L21/027; G03F9/00
Domestic Patent References:
| JP6471125A | ||||
| JP61271830A | ||||
| JP6187330A | ||||
| JP58176934A |
Attorney, Agent or Firm:
Tetsuya Ito (1 outside)