Title:
【発明の名称】位置検出装置
Document Type and Number:
Japanese Patent JP2833145
Kind Code:
B2
Inventors:
MATSUGI MASAKAZU
SAITO KENJI
SUDA SHIGEYUKI
SAITO KENJI
SUDA SHIGEYUKI
Application Number:
JP10490390A
Publication Date:
December 09, 1998
Filing Date:
April 20, 1990
Export Citation:
Assignee:
KYANON KK
International Classes:
G01B11/00; H01L21/027; H01L21/30; (IPC1-7): G01B11/00; H01L21/027
Attorney, Agent or Firm:
Takanashi Yukio