Title:
【発明の名称】周辺露光装置
Document Type and Number:
Japanese Patent JP2838570
Kind Code:
B2
More Like This:
Inventors:
MATSUMURA KIMIHARU
SAKAI HIROYUKI
SAKAI HIROYUKI
Application Number:
JP6336290A
Publication Date:
December 16, 1998
Filing Date:
March 14, 1990
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
H01L21/30; G03F7/20; H01L21/027; (IPC1-7): H01L21/027
Domestic Patent References:
| JP1132124A | ||||
| JP4849242A | ||||
| JP6295221U |
Attorney, Agent or Firm:
Masami Sato