Title:
【発明の名称】光半導体装置の製造方法
Document Type and Number:
Japanese Patent JP2850805
Kind Code:
B2
Inventors:
NAGANO TSUYOSHI
Application Number:
JP27685195A
Publication Date:
January 27, 1999
Filing Date:
September 29, 1995
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
H01L21/306; H01S5/00; (IPC1-7): H01S3/18; H01L21/306
Domestic Patent References:
| JP5315700A | ||||
| JP6203403A | ||||
| JP5853876A | ||||
| JP61203692A | ||||
| JP4240789A | ||||
| JP62211980A | ||||
| JP649683A | ||||
| JP6418227A |
Attorney, Agent or Firm:
Katsuragi Yuji