Title:
【発明の名称】化合物半導体結晶の気相成長法
Document Type and Number:
Japanese Patent JP2861192
Kind Code:
B2
Inventors:
SHIMAZU MITSURU
KIMURA HIROYA
KOKADO KOICHI
SHIRAKAWA FUTATSU
MURAI SHIGEO
KIMURA HIROYA
KOKADO KOICHI
SHIRAKAWA FUTATSU
MURAI SHIGEO
Application Number:
JP2945690A
Publication Date:
February 24, 1999
Filing Date:
February 13, 1990
Export Citation:
Assignee:
SUMITOMO DENKI KOGYO KK
International Classes:
C30B25/16; C30B29/40; C30B29/42; H01L21/205; (IPC1-7): H01L21/205
Domestic Patent References:
| JP63143810A | ||||
| JP1259524A | ||||
| JP1320297A |
Other References:
Ａｐｐｌ．Ｐｈｙｓ．Ｌｅｔｔ．５３（１４）１９８８−１０−３，ｐｐ．１３１７〜１３１９
Attorney, Agent or Firm:
Akira Uchida (2 outside)