Title:
【発明の名称】露光装置
Document Type and Number:
Japanese Patent JP2861443
Kind Code:
B2
Inventors:
HOKI YOJI
YANAGIDA KYOHISA
IKEYAMA TAKUZO
TAKANO MINORU
KOJIMA TAKEO
YANAGIDA KYOHISA
IKEYAMA TAKUZO
TAKANO MINORU
KOJIMA TAKEO
Application Number:
JP5507991A
Publication Date:
February 24, 1999
Filing Date:
March 19, 1991
Export Citation:
Assignee:
FUJITSU KK
International Classes:
G02B26/10; B41J2/44; G03G15/04; (IPC1-7): G02B26/10; G02B26/10
Attorney, Agent or Firm:
Teiichi