Title:
【発明の名称】変位測定装置及び方法
Document Type and Number:
Japanese Patent JP2862417
Kind Code:
B2
Abstract:
A scale having first and second optical gratings on both surfaces of a transparent parallel portion or a scale having a common optical grating with first and second optical gratings on one of the surfaces of the transparent parallel portion is prepared. A beam is radiated on the first optical grating of the scale to cause it to pass through the first optical grating, thereby two-dimensionally inverting an image of the first optical grating. The inverted image is projected on the second optical grating. The inverted image of the image of the first optical grating and the second optical grating are displaced in opposite directions upon movement of the scale. Relative displacement between the inverted image and the second optical grating is larger than the movement amount of the scale, thereby performing displacement detection with high resolution.
Inventors:
IGAKI MASAHIKO
Application Number:
JP26623091A
Publication Date:
March 03, 1999
Filing Date:
October 15, 1991
Export Citation:
Assignee:
KYANON KK
International Classes:
G01B11/00; G01D5/38; (IPC1-7): G01B11/00; G01D5/38
Domestic Patent References:
| JP5118880A | ||||
| JP2266224A | ||||
| JP4344412A |
Attorney, Agent or Firm:
Marushima Giichi