Title:
【発明の名称】露光制御装置
Document Type and Number:
Japanese Patent JP2867132
Kind Code:
B2
Inventors:
UKAJI TAKAO
TSURUOKA JUJI
YUI TAKASUMI
TSURUOKA JUJI
YUI TAKASUMI
Application Number:
JP30504297A
Publication Date:
March 08, 1999
Filing Date:
October 21, 1997
Export Citation:
Assignee:
KYANON KK
International Classes:
G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP61154128A | ||||
| JP6169132A | ||||
| JP10116783A | ||||
| JP2177414A | ||||
| JP57101839A | ||||
| JP61216324A | ||||
| JP5771132A | ||||
| JP6323316A | ||||
| JP61202437A | ||||
| JP60162258A |
Attorney, Agent or Firm:
Tatsuo Ito (2 outside)