【発明の名称】マイクロ波プラズマCVD装置

Title:

【発明の名称】マイクロ波プラズマCVD装置

Document Type and Number:

Japanese Patent JP2867150

Kind Code:

B2

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Inventors:

TAKEI TETSUYA
KATAGIRI HIROYUKI
SHIRASAGO TOSHASU

Application Number:

JP26630889A

Publication Date:

March 08, 1999

Filing Date:

October 16, 1989

Export Citation:

Assignee:

KYANON KK

International Classes:

C23C16/50; C23C16/44; C23C16/455; C23C16/511; (IPC1-7): C23C16/50; C23C16/44

Domestic Patent References:

JP6423537A

Attorney, Agent or Firm:

Toyoki Ogigami

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