Title:
【発明の名称】高解像光学系
Document Type and Number:
Japanese Patent JP2867375
Kind Code:
B2
Abstract:
The current limits of resolution of multi-element optical systems are exceeded by reducing the number of elements while introducing at the critical aperture a blazed transmission grating (60) having grating rings of low bending power defined by multiple plateaus. By illuminating the optical train with monochromatic light that constitutes a multiplicity of distributed sources having a substantial temporal coherence but spatial incoherence and by varying the slopes and widths of the grating rings, local phase delays are introduced that adjust aberrations in the optical system, providing an aligned composite wavefront. The system and method may be used for presenting an image, as for a wafer stepper, or for viewing an image, as in a microscope.
Inventors:
TEODOORU ROBAATO HOITSUTONII
Application Number:
JP25767388A
Publication Date:
March 08, 1999
Filing Date:
October 13, 1988
Export Citation:
Assignee:
TEODOORU ROBAATO HOITSUTONII
International Classes:
G02B5/18; G02B9/00; G02B19/00; G02B27/00; G02B5/32; G02B27/18; G02B27/42; G02B27/62; G03F1/08; G03F7/20; G03F9/00; H01L21/027; H01L21/30; H01S3/101; H01S3/137; (IPC1-7): G02B5/18; G02B19/00; G02B27/18; G02B27/42
Domestic Patent References:
| JP6191620A | ||||
| JP59137908A | ||||
| JP60181701A | ||||
| JP60214334A | ||||
| JP62229203A | ||||
| JP62238502A | ||||
| JP6190029U |
Other References:
Ｊｏｕｒｎａｌ ｏｆ Ｏｐｔｉｃａｌ Ｓｏｃｉｅｔｙ ｏｆ Ａｍｅｒｉｃａ，５１（１）（１９６１），ｐ．１７−２０
Ｏｐｔｉｃｓ Ｃｏｍｍｕｎｉｃａｔｉｏｎｓ，５（４）（１９７２），ｐ．２３２−２３５
Ｏｐｔｉｋ，６７（３）（１９８４），ｐ．２６７−２７８
Ｏｐｔｉｃｓ Ｃｏｍｍｕｎｉｃａｔｉｏｎｓ，５（４）（１９７２），ｐ．２３２−２３５
Ｏｐｔｉｋ，６７（３）（１９８４），ｐ．２６７−２７８
Attorney, Agent or Firm:
Kunihiko Ohashi