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Title:
【発明の名称】イオンビーム装置およびその使用方法
Document Type and Number:
Japanese Patent JP2867389
Kind Code:
B2
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Inventors:
KONISHI MORIKAZU
TAKIZAWA MASAAKI
Application Number:
JP26120988A
Publication Date:
March 08, 1999
Filing Date:
October 17, 1988
Export Citation:
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Assignee:
SONII KK
International Classes:
H01J37/08; H01J27/02; H01J27/26; H01J37/18; H01J37/317; (IPC1-7): H01J27/02; H01J27/26; H01J37/08; H01J37/18
Domestic Patent References:
JP62163246A
JP60257049A
JP6412359U
Attorney, Agent or Firm:
Masatomo Sugiura



 
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