【発明の名称】検査装置

Title:

【発明の名称】検査装置

Document Type and Number:

Japanese Patent JP2869570

Kind Code:

B2

More Like This:

JPH109827	METHOD AND EQUIPMENT FOR DETERMINING HEIGHT
JP2588710	[Name of device] Socket for TSOP type IC and floating guide

Inventors:

MIZUKAMI MASAMI
TANAKA KYOSHI
AKAIKE SHINJI
KASAI SHIGERU

Application Number:

JP6922590A

Publication Date:

March 10, 1999

Filing Date:

March 19, 1990

Export Citation:

Assignee:

TOKYO EREKUTORON KK

International Classes:

H01L21/66; G01R31/26; H01L21/68; (IPC1-7): H01L21/66; G01R31/26; H01L21/68

Domestic Patent References:

JP1243535A

Attorney, Agent or Firm:

Saichi Suyama (1 person outside)

Previous Patent: 地盤凍結法による大深度、大規模地下空間の構築方法及びその地盤凍結管

Next Patent: 蒸気式レトルト殺菌装置及びこの装置による徐冷方法