【発明の名称】薄膜トランジスタの製造方法

Title:

【発明の名称】薄膜トランジスタの製造方法

Document Type and Number:

Japanese Patent JP2874062

Kind Code:

B2

Inventors:

UEMOTO YASUHIRO
FUJII EIJI
SENDA KOJI

Application Number:

JP3004091A

Publication Date:

March 24, 1999

Filing Date:

February 25, 1991

Export Citation:

Assignee:

MATSUSHITA DENSHI KOGYO KK

International Classes:

H01L21/20; H01L21/205; H01L21/336; H01L29/78; H01L29/786; (IPC1-7): H01L29/786; H01L21/20; H01L21/205; H01L21/336

Domestic Patent References:

JP62196358U

Attorney, Agent or Firm:

Tomoyuki Takimoto (1 person outside)

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