Title:
【発明の名称】熱処理装置及び熱処理方法
Document Type and Number:
Japanese Patent JP2879047
Kind Code:
B2
Inventors:
NAKAMAKI SHIN
Application Number:
JP9436789A
Publication Date:
April 05, 1999
Filing Date:
April 14, 1989
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
H01L21/22; H01L21/205; H01L21/223; (IPC1-7): H01L21/22; H01L21/205
Domestic Patent References:
JP6445116A | ||||
JP5171674A | ||||
JP5978526A | ||||
JP59104123A | ||||
JP6276616A | ||||
JP5149191B2 |
Attorney, Agent or Firm:
Moriya Kazuo