Title:
【発明の名称】ボンディング装置におけるフレーム押出装置
Document Type and Number:
Japanese Patent JP2880391
Kind Code:
B2
Abstract:
PURPOSE:To provide a frame extruder allowing highly accurate extrusion of a frame outside a magazine while avoiding a human error by an operator together with allowing high-speed operation. CONSTITUTION:A power transmission system which transmits driving force generated by a pulse motor 126 to a pusher 94 includes a worm 127 and a worm wheel 128 so as to make force to be applied by an operator to the pusher 94 not to be transmitted to the pulse motor 126. Further, reduction of vibration to be transmitted from the pulse motor to the pusher and reduction of inertia at the time of operation of a power transmission system as a whole can be attained by a moderation ratio between the worm 127 and the worm wheel 128.
Inventors:
TORIGOE TOSHIZO
Application Number:
JP31602993A
Publication Date:
April 05, 1999
Filing Date:
November 22, 1993
Export Citation:
Assignee:
KAIJOO KK
International Classes:
H01L21/60; H01L21/50; (IPC1-7): H01L21/50
Attorney, Agent or Firm:
Shoji Hagiri