Title:
【発明の名称】真空バルブ形開閉装置の真空度低下検出装置
Document Type and Number:
Japanese Patent JP2885233
Kind Code:
B2
Inventors:
IWAI HIROMI
USUI NOBORU
YAGI JUJIRO
SHIBATA KAZUO
SUZUKI NOBUO
USUI NOBORU
YAGI JUJIRO
SHIBATA KAZUO
SUZUKI NOBUO
Application Number:
JP17507197A
Publication Date:
April 19, 1999
Filing Date:
July 01, 1997
Export Citation:
Assignee:
FUJI DENKI KK
International Classes:
G01L21/00; H01H33/66; (IPC1-7): H01H33/66; G01L21/00
Domestic Patent References:
| JP5286165A | ||||
| JP4959974A |
Attorney, Agent or Firm:
Shoji Shinobe