Title:
【発明の名称】イオン注入方法
Document Type and Number:
Japanese Patent JP2888660
Kind Code:
B2
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Inventors:
SUGYAMA KENJI
SASAKI JUN
SASAKI JUN
Application Number:
JP6309091A
Publication Date:
May 10, 1999
Filing Date:
March 27, 1991
Export Citation:
Assignee:
SHINNIPPON SEITETSU KK
International Classes:
C23C14/48; (IPC1-7): C23C14/48
Domestic Patent References:
| JP4503535A |
Attorney, Agent or Firm:
Aoki Akira (4 outside)