Title:
【発明の名称】バンプ付基板の検査装置、検査方法及びバンプ付基板の製造方法
Document Type and Number:
Japanese Patent JP2888823
Kind Code:
B1
Inventors:
Masato Nagasaki
Tomoyoshi Tsunekawa
Youichi Matsubara
Akira Odagiri
Tomoyoshi Tsunekawa
Youichi Matsubara
Akira Odagiri
Application Number:
JP10555498A
Publication Date:
May 10, 1999
Filing Date:
March 31, 1998
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
Takano Co., Ltd.
Takano Co., Ltd.
International Classes:
H05K3/34; G01B11/02; G01B11/24; G01N21/88; G01N21/93; G01N21/956; G02B26/10; H01L23/12; H05K3/00; (IPC1-7): G01B11/02; G01B11/24; G01N21/88; H01L23/12; H05K3/00; H05K3/34
Domestic Patent References:
| JP6167322A | ||||
| JP213802A | ||||
| JP4310807A | ||||
| JP4350506A | ||||
| JP1012683A | ||||
| JP8159721A | ||||
| JP9196625A |
Attorney, Agent or Firm:
Masanori Sugawara