Title:
【発明の名称】薄膜トランジスタの検査装置
Document Type and Number:
Japanese Patent JP2889132
Kind Code:
B2
Abstract:
An apparatus and a method for inspecting a thin film transistor easily and securely with good reproducibility without adverse effect on elements of the thin film transistor even if the thin film transistor is not provided with a capacitative element. The apparatus includes an inspection signal generating device for inputting drive pulse signals and test pulse signals, respectively to a gate electrode; a test voltage generating device for inputting a test voltage to the source electrode in synchronism with the drive pulse signals; an external electrode arranged to be opposed to the drive electrode and forming therebetween a capacitance for storing test charges; and an electric signal detecting device for detecting electric signals output from the capacitance formed between the drive electrode and the external electrode to the source electrode in synchronism with test pulse signals to be input to the gate electrode.
Inventors:
MIMORI KENICHI
KIKUCHI KOJI
KIKUCHI KOJI
Application Number:
JP24661694A
Publication Date:
May 10, 1999
Filing Date:
October 12, 1994
Export Citation:
Assignee:
FURONTETSUKU KK
International Classes:
G01R31/00; G01R31/26; G02F1/136; G02F1/1368; H01L21/66; H01L29/786; (IPC1-7): G01R31/26; G01R31/00; G02F1/136; H01L21/66; H01L29/786
Domestic Patent References:
| JP434491A | ||||
| JP659283A | ||||
| JP3200121A |
Attorney, Agent or Firm:
Masatake Shiga (2 outside)