Title:
【発明の名称】処理装置及び処理方法
Document Type and Number:
Japanese Patent JP2890081
Kind Code:
B2
Inventors:
KIMURA YOSHIO
Application Number:
JP35119291A
Publication Date:
May 10, 1999
Filing Date:
December 13, 1991
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
B05B15/02; B08B3/02; H01L21/027; H01L21/30; H01L21/304; (IPC1-7): H01L21/027
Domestic Patent References:
| JP60198818A | ||||
| JP2218467A |
Attorney, Agent or Firm:
Kikuhiko Nakamoto