Title:
【発明の名称】レーザー微細加工装置
Document Type and Number:
Japanese Patent JP2892483
Kind Code:
B2
Inventors:
OOYA TOMONORI
Application Number:
JP28004090A
Publication Date:
May 17, 1999
Filing Date:
October 18, 1990
Export Citation:
Assignee:
HAMAMATSU HOTONIKUSU KK
International Classes:
B23K26/064; B23K26/12; H01S3/00; (IPC1-7): B23K26/12; B23K26/06
Domestic Patent References:
| JP6422494A | ||||
| JP1273687A |
Attorney, Agent or Firm:
Yoshiki Hasegawa (3 outside)