Title:
【発明の名称】ホトマスクおよびホトマスクの製造方法
Document Type and Number:
Japanese Patent JP2892753
Kind Code:
B2
Inventors:
HASEGAWA NORIO
IMAI AKIRA
TANAKA TOSHIHIKO
IMAI AKIRA
TANAKA TOSHIHIKO
Application Number:
JP5635390A
Publication Date:
May 17, 1999
Filing Date:
March 09, 1990
Export Citation:
Assignee:
HITACHI SEISAKUSHO KK
International Classes:
G03F1/30; G03F1/68; G03F1/70; G03F1/80; H01L21/027; H01L21/30; (IPC1-7): G03F1/08; H01L21/027
Domestic Patent References:
| JP378747A | ||||
| JP3208050A | ||||
| JP2211450A | ||||
| JP61292643A |
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)