Title:
【発明の名称】半導体装置
Document Type and Number:
Japanese Patent JP2900522
Kind Code:
B2
Inventors:
HOSODA TSUTOMU
Application Number:
JP14235290A
Publication Date:
June 02, 1999
Filing Date:
May 31, 1990
Export Citation:
Assignee:
FUJITSU KK
International Classes:
H01L23/52; H01L21/3205; (IPC1-7): H01L21/3205
Domestic Patent References:
| JP62114241A | ||||
| JP6442857A |
Attorney, Agent or Firm:
Teiichi