Title:
【発明の名称】ボンダー
Document Type and Number:
Japanese Patent JP2904663
Kind Code:
B2
Abstract:
PURPOSE:To provide a bonder that keeps stable operation for an extended period and achieves more efficiency in operation. CONSTITUTION:A positioning means 42 that positions by moving a frame housing means M in the frame array direction is provided with detecting means 55a and 55b, to detect presence and posture, etc., of the frame housing means M with the detecting means, far prompt counter measures and assured stable operation. In addition, between a transportation means 54 that transports the frame housing means M and a loader/unloader that contains the positioning means 42, a transfer means that transfers the frame housing means M interlocks with the positioning means 42, so that the frame housing means M is continuously supplied to a bonding means. Thus, bonding is efficiently done with no loss time, for improved work efficiency.
Inventors:
YANAGIDA KATSURO
MYOSHI HIDEAKI
GOTO KIKUO
NISHIZAKI MITSUHIRO
MYOSHI HIDEAKI
GOTO KIKUO
NISHIZAKI MITSUHIRO
Application Number:
JP33370992A
Publication Date:
June 14, 1999
Filing Date:
November 19, 1992
Export Citation:
Assignee:
KAIJOO KK
SONII KK
SONII KK
International Classes:
H01L21/60; H01L21/50; (IPC1-7): H01L21/60; H01L21/50
Domestic Patent References:
| JP4245651A | ||||
| JP59181544A | ||||
| JP6220017U |
Attorney, Agent or Firm:
Shoji Hagiri