Title:
【発明の名称】半導体ウェハのC-V測定方法および可動イオン量測定方法
Document Type and Number:
Japanese Patent JP2904697
Kind Code:
B2
Inventors:
HIRAE SADAO
KUSUDA TATSUFUMI
MATSUBARA HIDEAKI
KUSUDA TATSUFUMI
MATSUBARA HIDEAKI
Application Number:
JP30339693A
Publication Date:
June 14, 1999
Filing Date:
November 08, 1993
Export Citation:
Assignee:
DAINIPPON SUKURIIN SEIZO KK
International Classes:
G01R27/26; H01L21/66; (IPC1-7): H01L21/66; G01R27/26
Other References:
【文献】特許2802825(JP,B2)
【文献】特許2813755(JP,B2)
【文献】特許2802868(JP,B2)
【文献】特許2813755(JP,B2)
【文献】特許2802868(JP,B2)
Attorney, Agent or Firm:
Takashi Shimode (1 outside)