Title:
【発明の名称】ターボ分子ポンプ
Document Type and Number:
Japanese Patent JP2906714
Kind Code:
B2
More Like This:
| JPS5816394 | [Title of the device] Turbo-molecular pump |
| JP4898076 | Pump as a side road type pump |
| JPH10196586 | TURBO VACUUM PUMP |
Inventors:
KUBO MASAHIDE
Application Number:
JP6683391A
Publication Date:
June 21, 1999
Filing Date:
March 29, 1991
Export Citation:
Assignee:
SHIMAZU SEISAKUSHO KK
International Classes:
F04D19/04; (IPC1-7): F04D19/04
Domestic Patent References:
| JP62279282A | ||||
| JP1273899A |
Attorney, Agent or Firm:
Kazuhiro Akazawa