Title:
【発明の名称】スパッタリング装置
Document Type and Number:
Japanese Patent JP2912181
Kind Code:
B2
Inventors:
AKIMOTO SHINICHI
Application Number:
JP4018295A
Publication Date:
June 28, 1999
Filing Date:
February 28, 1995
Export Citation:
Assignee:
HIROSHIMA NIPPON DENKI KK
International Classes:
C23C14/34; H01L21/203; (IPC1-7): C23C14/34; H01L21/203
Domestic Patent References:
| JP61243173A | ||||
| JP1111872A | ||||
| JP5247628A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)