【発明の名称】酸化物薄膜の製造方法

Title:

【発明の名称】酸化物薄膜の製造方法

Document Type and Number:

Japanese Patent JP2916514

Kind Code:

B2

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Inventors:

MORIWAKI KAZUYUKI
MURAKAMI TOSHIAKI
YAMAJI AKIHIKO

Application Number:

JP2441590A

Publication Date:

July 05, 1999

Filing Date:

February 05, 1990

Export Citation:

Assignee:

NIPPON DENSHIN DENWA KK

International Classes:

C01B13/14; C01G1/00; (IPC1-7): C01B13/14; C01G1/00

Attorney, Agent or Firm:

Yoshikazu Tani

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