Title:
【発明の名称】チップ供給装置
Document Type and Number:
Japanese Patent JP2917511
Kind Code:
B2
Inventors:
NISHIDA KENICHI
Application Number:
JP32363990A
Publication Date:
July 12, 1999
Filing Date:
November 26, 1990
Export Citation:
Assignee:
MATSUSHITA DENKI SANGYO KK
International Classes:
H01L21/67; H01L21/301; H01L21/68; (IPC1-7): H01L21/68; H01L21/301
Domestic Patent References:
| JP6422036U |
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)