【発明の名称】処理装置

Title:

【発明の名称】処理装置

Document Type and Number:

Japanese Patent JP2920454

Kind Code:

B2

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Inventors:

YASUDA KENJI
SANADA HIROYUKI
KANBAYASHI TERU
MURAKAMI MASAAKI

Application Number:

JP16377193A

Publication Date:

July 19, 1999

Filing Date:

June 10, 1993

Export Citation:

Assignee:

TOKYO EREKUTORON KK

International Classes:

B65G49/07; B25J15/06; H01L21/027; H01L21/30; H01L21/677; H01L21/68; (IPC1-7): B65G49/07; B25J15/06; H01L21/68

Domestic Patent References:

Attorney, Agent or Firm:

Kikuhiko Nakamoto

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