Title:
【発明の名称】不純物ドーピング法
Document Type and Number:
Japanese Patent JP2921288
Kind Code:
B2
Inventors:
SONE SHUJI
Application Number:
JP23791692A
Publication Date:
July 19, 1999
Filing Date:
September 07, 1992
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
C30B23/08; H01L21/203; H01L21/363; (IPC1-7): H01L21/363; C30B23/08; H01L21/203
Domestic Patent References:
| JP330418A | ||||
| JP334534A |
Other References:
Ａｐｐｌ．Ｐｈｙｓ．Ｌｅｔｔ．，Ｖｏｌ．５８，Ｎｏ．２３（１９９１）ｐ．２６５１−２６５３
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)