Title:
【発明の名称】低温ドライエッチング方法およびその装置
Document Type and Number:
Japanese Patent JP2924596
Kind Code:
B2
Inventors:
IMOTO KATSUYUKI
HORI AKIHIRO
HORI AKIHIRO
Application Number:
JP23974593A
Publication Date:
July 26, 1999
Filing Date:
September 27, 1993
Export Citation:
Assignee:
HITACHI DENSEN KK
International Classes:
C23F4/00; H01L21/302; H01L21/3065; (IPC1-7): C23F4/00; H01L21/3065
Domestic Patent References:
| JP4251921A | ||||
| JP449617A | ||||
| JP4360527A | ||||
| JP6326056A | ||||
| JP1173932U |
Attorney, Agent or Firm:
Takashi Matsumoto