【発明の名称】堆積膜形成方法

Title:

【発明の名称】堆積膜形成方法

Document Type and Number:

Japanese Patent JP2925298

Kind Code:

B2

Inventors:

TAKEI TETSUYA
NIINO HIROAKI
OKAMURA TATSUJI

Application Number:

JP30496190A

Publication Date:

July 28, 1999

Filing Date:

November 08, 1990

Export Citation:

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Assignee:

KYANON KK

International Classes:

C23C16/50; C23C16/42; C23C16/511; G03G5/08; H01L21/205; H01L21/31; (IPC1-7): C23C16/42; C23C16/50; G03G5/08; H01L21/205; H01L21/31

Domestic Patent References:

JP210368A
JP2181974A
JP60186849A

Attorney, Agent or Firm:

Giichi Marushima (1 person outside)

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